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                                       Details for article 13 of 29 found articles
 
 
  Local racetrack plasma composition during reactive magnetron sputtering of ZnO:Al using rotatable Zn:Al target and influence on film properties
 
 
Title: Local racetrack plasma composition during reactive magnetron sputtering of ZnO:Al using rotatable Zn:Al target and influence on film properties
Author: Linss, Volker
Appeared in: Surface & coatings technology
Paging: Volume 241 (2014) nr. C pages 7 p.
Year: 2014
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 29 found articles
 
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