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  A comparative study of conventional magnetron sputter deposited and plasma enhanced magnetron sputter deposited Ti–Si–C–N nanocomposite coatings
 
 
Title: A comparative study of conventional magnetron sputter deposited and plasma enhanced magnetron sputter deposited Ti–Si–C–N nanocomposite coatings
Author: El-Rahman, A.M. Abd
Wei, Ronghua
Appeared in: Surface & coatings technology
Paging: Volume 241 (2014) nr. C pages 6 p.
Year: 2014
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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