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Journal description
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Details for article 77 of 127 found articles
| Title: |
Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl2/Ar plasma using neural network |
| Author: |
Kim, Moonkeun Jang, Hanbyeol Lee, Yong-Hwa Kwon, Kwang-Ho Park, Kang-Bak |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 231 (2013) nr. C pages 4 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 77 of 127 found articles
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