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                                       Details for article 48 of 51 found articles
 
 
  The deposition of copper-based thin films via atmospheric pressure plasma-enhanced CVD
 
 
Title: The deposition of copper-based thin films via atmospheric pressure plasma-enhanced CVD
Author: Hodgkinson, John L.
Massey, David
Sheel, David W.
Appeared in: Surface & coatings technology
Paging: Volume 230 (2013) nr. C pages 6 p.
Year: 2013
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 48 of 51 found articles
 
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