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Journal description
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Details for article 42 of 134 found articles
| Title: |
Gas barrier properties of SiON films deposited by plasma enhanced chemical vapor deposition at low temperature as a function of the plasma process parameters |
| Author: |
Jin, Su B. Lee, Joon S. Choi, Yoon S. Choi, In S. Han, Jeon G. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 228 (2013) nr. S1 pages 5 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 42 of 134 found articles
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