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Details for article 17 of 19 found articles
| Title: |
The parameter space of hydrogen content added to Ar–nitrogen sputtering gas and substrate bias voltage for the formation of cubic boron nitride thin film deposited by unbalanced magnetron sputtering method |
| Author: |
Ko, J.-S. Park, J.-K. Lee, W.-S. Baik, Y.-J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 223 (2013) nr. C pages 4 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 19 found articles
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