Deposition of titanium oxide films by reactive High Power Impulse Magnetron Sputtering (HiPIMS): Influence of the peak current value on the transition from metallic to poisoned regimes
Titel:
Deposition of titanium oxide films by reactive High Power Impulse Magnetron Sputtering (HiPIMS): Influence of the peak current value on the transition from metallic to poisoned regimes
Auteur:
Nouvellon, C. Michiels, M. Dauchot, J.P. Archambeau, C. Laffineur, F. Silberberg, E. Delvaux, S. Cloots, R. Konstantinidis, S. Snyders, R.