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Journal description
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Details for article 67 of 133 found articles
| Title: |
Influence of the PVD sputtering method on structural characteristics of SiCN-coatings — Comparison of RF, DC and HiPIMS sputtering and target configurations |
| Author: |
Pusch, Casper Hoche, Holger Berger, Christina Riedel, Ralf Ionescu, Emanuel Klein, Andreas |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 205 (2011) nr. S2 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 67 of 133 found articles
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