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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 59 of 133 found articles
| Title: |
High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD |
| Author: |
Günther, M. Bialuch, I. Peter, S. Bewilogua, K. Richter, F. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 205 (2011) nr. S2 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 59 of 133 found articles
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