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                                       Details for article 103 of 133 found articles
 
 
  Structural and optical properties of a-SiCN thin film synthesised in a microwave plasma at constant temperature and different flow of CH4 added to HMDSN/N2/Ar mixture
 
 
Title: Structural and optical properties of a-SiCN thin film synthesised in a microwave plasma at constant temperature and different flow of CH4 added to HMDSN/N2/Ar mixture
Author: Bulou, S.
Le Brizoual, L.
Miska, P.
de Poucques, L.
Hugon, R.
Belmahi, M.
Bougdira, J.
Appeared in: Surface & coatings technology
Paging: Volume 205 (2011) nr. S2 pages 4 p.
Year: 2011
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 103 of 133 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands