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Journal description
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Details for article 2 of 83 found articles
| Title: |
AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review |
| Author: |
Wingqvist, G. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 205 (2010) nr. 5 pages 8 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 83 found articles
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