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  Tuning bond contents in B–C–N films via temperature and bias voltage within RF magnetron sputtering
 
 
Title: Tuning bond contents in B–C–N films via temperature and bias voltage within RF magnetron sputtering
Author: Zhuang, Chunqiang
Zhao, Jijun
Jia, Fuchao
Guan, Changyu
Wu, Zhanling
Bai, Yizhen
Jiang, Xin
Appeared in: Surface & coatings technology
Paging: Volume 204 (2009) nr. 5 pages 5 p.
Year: 2009
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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