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                                       Details for article 17 of 34 found articles
 
 
  Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system
 
 
Title: Laser chemical vapor deposition of titanium nitride films with tetrakis (diethylamido) titanium and ammonia system
Author: Gong, Yansheng
Tu, Rong
Goto, Takashi
Appeared in: Surface & coatings technology
Paging: Volume 204 (2010) nr. 14 pages 7 p.
Year: 2010
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 17 of 34 found articles
 
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