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                                       Details for article 22 of 27 found articles
 
 
  Plasma enhanced CVD of fluorocarbon films by low-pressure dielectric barrier discharge
 
 
Title: Plasma enhanced CVD of fluorocarbon films by low-pressure dielectric barrier discharge
Author: Liu, Dongping
Li, Wei
Feng, Zhiqing
Tan, Xiaodong
Chen, Baoxiang
Niu, Jinhai
Liu, Yanhong
Appeared in: Surface & coatings technology
Paging: Volume 203 (2009) nr. 9 pages 6 p.
Year: 2009
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 22 of 27 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands