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Journal description
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Details for article 23 of 25 found articles
| Title: |
The influence of plasma power on the temperature-dependant conductivity and on the wet chemical etch rate of sputter-deposited alumina thin films |
| Author: |
Fricke, S. Friedberger, A. Schmid, U. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 203 (2009) nr. 19 pages 5 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 25 found articles
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