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Effect of carbon implantation on visible luminescence and composition of Si-implanted SiO2 layers |
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Title: |
Effect of carbon implantation on visible luminescence and composition of Si-implanted SiO2 layers |
Author: |
Tetelbaum, D.I. Mikhaylov, A.N. Vasiliev, V.K. Belov, A.I. Kovalev, A.I. Wainstein, D.L. Mendeleva, Yu.A. Finstad, T.G. Foss, S. Golan, Y. Osherov, A. |
Appeared in: |
Surface & coatings technology |
Paging: |
Volume 203 (2009) nr. 17-18 pages 6 p. |
Year: |
2009 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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