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                                       Details for article 12 of 28 found articles
 
 
  Effect of H2 dilution gas on the growth of ZrC during low pressure chemical vapor deposition in the ZrCl4–CH4–Ar system
 
 
Title: Effect of H2 dilution gas on the growth of ZrC during low pressure chemical vapor deposition in the ZrCl4–CH4–Ar system
Author: Park, Jong Hoon
Jung, Choong Hwan
Kim, Do Jin
Park, Ji Yeon
Appeared in: Surface & coatings technology
Paging: Volume 203 (2008) nr. 1-2 pages 4 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 12 of 28 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands