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                                       Details for article 20 of 135 found articles
 
 
  Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD
 
 
Title: Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD
Author: Cech, V.
Studynka, J.
Cechalova, B.
Mistrik, J.
Zemek, J.
Appeared in: Surface & coatings technology
Paging: Volume 202 (2008) nr. 22-23 pages 4 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 20 of 135 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands