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Journal description
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Details for article 111 of 135 found articles
| Title: |
Scalable internal linear double comb-type inductively coupled plasma source for large area flat panel display processing |
| Author: |
Kim, Kyong Nam Lim, Jong Hyeuk Park, Jung Kyun Yeom, Geun Young |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 202 (2008) nr. 22-23 pages 4 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 111 of 135 found articles
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