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                                       Details for article 7 of 56 found articles
 
 
  Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN
 
 
Title: Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN
Author: Mahieu, S.
Depla, D.
Gryse, R. De
Appeared in: Surface & coatings technology
Paging: Volume 202 (2008) nr. 11 pages 5 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 56 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands