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                                       Details for article 92 of 213 found articles
 
 
  Influence of sputtering bias on the microstructure and properties of Nb–Si–N films
 
 
Title: Influence of sputtering bias on the microstructure and properties of Nb–Si–N films
Author: Wang, Jianfeng
Song, Zhongxiao
Xu, Kewei
Appeared in: Surface & coatings technology
Paging: Volume 201 (2007) nr. 9-11 pages 4 p.
Year: 2007
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 92 of 213 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands