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  A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste
 
 
Title: A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste
Author: Iwashita, Shinya
Koga, Kazunori
Shiratani, Masaharu
Appeared in: Surface & coatings technology
Paging: Volume 201 (2007) nr. 9-11 pages 4 p.
Year: 2007
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 213 found articles
 
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