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                                       Details for article 175 of 213 found articles
 
 
  Superhard tantalum-nitride films formed by inductively coupled plasma-assisted sputtering
 
 
Title: Superhard tantalum-nitride films formed by inductively coupled plasma-assisted sputtering
Author: Lee, G.R.
Kim, H.
Choi, H.S.
Lee, J.J.
Appeared in: Surface & coatings technology
Paging: Volume 201 (2007) nr. 9-11 pages 4 p.
Year: 2007
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 175 of 213 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands