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                                       Details for article 103 of 228 found articles
 
 
  Hot target sputtering: A new way for high-rate deposition of stoichiometric ceramic films
 
 
Title: Hot target sputtering: A new way for high-rate deposition of stoichiometric ceramic films
Author: Mercs, D.
Perry, F.
Billard, A.
Appeared in: Surface & coatings technology
Paging: Volume 201 (2006) nr. 6 pages 6 p.
Year: 2006
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 103 of 228 found articles
 
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