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                                       Details for article 10 of 228 found articles
 
 
  Anisotropic residual stresses in sputtered TiN films prepared by linear periodic motion
 
 
Title: Anisotropic residual stresses in sputtered TiN films prepared by linear periodic motion
Author: Hubenthal, F.
Stobiecki, T.
Thoma, K.
Röll, K.
Appeared in: Surface & coatings technology
Paging: Volume 201 (2006) nr. 6 pages 7 p.
Year: 2006
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 10 of 228 found articles
 
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