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Journal description
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Details for article 62 of 122 found articles
| Title: |
Low-k dielectrics on base of silicon carbon nitride films |
| Author: |
Fainer, Nadezhda Rumyantsev, Yuri Kosinova, Marina Maximovski, Eugeni Kesler, Valeri Kirienko, Victor Kuznetsov, Fedor |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 201 (2007) nr. 22-23 pages 6 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 62 of 122 found articles
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