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Thermal diffusion behavior of implanted germanium atoms in silicon dioxide film measured by high-resolution RBS |
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Titel: |
Thermal diffusion behavior of implanted germanium atoms in silicon dioxide film measured by high-resolution RBS |
Auteur: |
Arai, Nobutoshi Tsuji, Hiroshi Gotoh, Naoyuki Minotani, Takashi Ishibashi, Toyotsugu Okumine, Tetsuya Adachi, Kouichirou Kotaki, Hiroshi Gotoh, Yasuhito Ishikawa, Junzo |
Verschenen in: |
Surface & coatings technology |
Paginering: |
Jaargang 201 (2007) nr. 19-20 pagina's 5 p. |
Jaar: |
2007 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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