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                                       Details for article 94 of 102 found articles
 
 
  Synthesis of carbon nitride thin films on Si(100) surface by using penning-type discharge sputtering technique
 
 
Title: Synthesis of carbon nitride thin films on Si(100) surface by using penning-type discharge sputtering technique
Author: Li, H.Y.
Shi, Y.C.
Feng, X.P.
Appeared in: Surface & coatings technology
Paging: Volume 201 (2007) nr. 15 pages 3 p.
Year: 2007
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 94 of 102 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands