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Journal description
All volumes of the corresponding journal
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All articles of the corresponding issues
Details for article 11 of 102 found articles
| Title: |
Characterization and optimization of a plasma doping process using a pulsed RF-excited B2H6 plasma system |
| Author: |
Qin, Shu McTeer, Allen |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 201 (2007) nr. 15 pages 9 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 102 found articles
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