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Journal description
All volumes of the corresponding journal
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Details for article 22 of 75 found articles
| Title: |
Effects of showerhead shapes on the flowfields in a RF-PECVD reactor |
| Author: |
Kim, You-Jae Boo, Jin-Hyo Hong, Byungyou Kim, Youn J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 193 (2005) nr. 1-3 pages 6 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 75 found articles
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