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Influences of the nitrogen content on the morphological, chemical and optical properties of pulsed laser deposited silicon nitride thin films |
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Title: |
Influences of the nitrogen content on the morphological, chemical and optical properties of pulsed laser deposited silicon nitride thin films |
Author: |
Lackner, J.M. Waldhauser, W. Berghauser, R. Ebner, R. Beutl, M. Jakopic, G. Leising, G. Hutter, H. Rosner, M. Schöberl, T. |
Appeared in: |
Surface & coatings technology |
Paging: |
Volume 192 (2005) nr. 2-3 pages 6 p. |
Year: |
2005 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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