Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films
Titel:
Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films
Auteur:
Vaz, F. Ferreira, J. Ribeiro, E. Rebouta, L. Lanceros-Méndez, S. Mendes, J.A. Alves, E. Goudeau, Ph. Rivière, J.P. Ribeiro, F. Moutinho, I. Pischow, K. de Rijk, J.