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                                       Details for article 5 of 22 found articles
 
 
  Effect of nitrogen flow rate on structure and properties of nanocrystalline TiN thin films produced by unbalanced magnetron sputtering
 
 
Title: Effect of nitrogen flow rate on structure and properties of nanocrystalline TiN thin films produced by unbalanced magnetron sputtering
Author: Huang, Jia-Hong
Lau, Kiang-Wee
Yu, Ge-Ping
Appeared in: Surface & coatings technology
Paging: Volume 191 (2005) nr. 1 pages 8 p.
Year: 2005
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 22 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands