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Journal description
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Details for article 16 of 19 found articles
| Title: |
Supercritical fluid immersion deposition: a new process for selective deposition of metal films on silicon substrates |
| Author: |
Ye, Xiang R. Wai, Chien M. Lin, Yuehe Young, James S. Engelhard, Mark H. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 190 (2005) nr. 1 pages 7 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 19 found articles
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