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                                       Details for article 12 of 33 found articles
 
 
  Influence of Si content on Nano-structured Ti–Si–N films coated by pulsed-d.c. plasma enhanced CVD
 
 
Title: Influence of Si content on Nano-structured Ti–Si–N films coated by pulsed-d.c. plasma enhanced CVD
Author: Ma, Dayan
Ma, Shengli
Xu, Kewei
Appeared in: Surface & coatings technology
Paging: Volume 184 (2004) nr. 2-3 pages 6 p.
Year: 2004
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 12 of 33 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands