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Journal description
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Details for article 2 of 18 found articles
| Title: |
Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications |
| Author: |
Mortet, V. Vasin, A. Jouan, P.-Y. Elmazria, O. Djouadi, M.-A. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 176 (2003) nr. 1 pages 5 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 18 found articles
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