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Journal description
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Details for article 18 of 27 found articles
| Title: |
Optical emission spectroscopy study of r.f. magnetron sputtering discharge used for multilayers thin film deposition |
| Author: |
Zambrano, G. Riascos, H. Prieto, P. Restrepo, E. Devia, A. Rincón, C. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 172 (2003) nr. 2-3 pages 6 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 27 found articles
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