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Journal description
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Details for article 7 of 62 found articles
| Title: |
Characterization of low-dielectric-constant SiOC thin films deposited by PECVD for interlayer dielectrics of multilevel interconnection |
| Author: |
Kim, Hyeong Joon Shao, Qingyi Kim, Yoon-Hae |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 171 (2003) nr. 1-3 pages 7 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 62 found articles
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