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Journal description
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Details for article 14 of 62 found articles
| Title: |
Dry etching characteristics of (Ba0.6,Sr0.4)TiO3 thin films in high density CF4/Ar plasma |
| Author: |
Kang, Pil-Seung Kim, Kyoung-Tae Kim, Dong-Pyo Kim, Chang-Il Efremov, Alexander M. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 171 (2003) nr. 1-3 pages 7 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 62 found articles
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