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Journal description
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Details for article 16 of 26 found articles
| Title: |
Investigation of the rf and dc hollow cathode plasma-jet sputtering systems for the deposition of silicon thin films |
| Author: |
Hubička, Z. Pribil, G. Soukup, R.J. Ianno, N.J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 160 (2002) nr. 2-3 pages 10 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 26 found articles
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