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Journal description
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Details for article 31 of 35 found articles
| Title: |
Substrate heating by sputter-deposition of AlN: the effects of dc and rf discharges in nitrogen atmosphere |
| Author: |
Drüsedau, Tilo P Koppenhagen, Kay |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 153 (2002) nr. 2-3 pages 5 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 35 found articles
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