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                                       Details for article 14 of 14 found articles
 
 
  Silicon nitride films prepared by high-density plasma chemical vapor deposition for solar cell applications
 
 
Title: Silicon nitride films prepared by high-density plasma chemical vapor deposition for solar cell applications
Author: Lee, S.H.
Lee, I.
Yi, J.
Appeared in: Surface & coatings technology
Paging: Volume 153 (2002) nr. 1 pages 5 p.
Year: 2002
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 14 of 14 found articles
 
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