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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 24 of 24 found articles
| Title: |
Two-dimensional modeling and optimization of a neutral loop discharge etcher in an argon plasma |
| Author: |
Okraku-Yirenkyi, Yaw Sung, Youl-Moon Otsubo, Masahisa Honda, Chikahisa Sakoda, Tatsuya |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 149 (2002) nr. 2-3 pages 7 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 24 of 24 found articles
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