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                                       Details for article 2 of 24 found articles
 
 
  A molecular dynamics study of deposition rate dependence of film morphology in the sputtering process
 
 
Title: A molecular dynamics study of deposition rate dependence of film morphology in the sputtering process
Author: Ju, Shin-Pon
Weng, Cheng-I
Chang, Jee-Gong
Hwang, Chi-Chuan
Appeared in: Surface & coatings technology
Paging: Volume 149 (2002) nr. 2-3 pages 8 p.
Year: 2002
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 24 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands