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Journal description
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Details for article 10 of 13 found articles
| Title: |
Preparation of amorphous Si1−x C x (0≤x≤1) films by alternate deposition of Si and C thin layers using a dual magnetron sputtering source |
| Author: |
Kikuchi, Naoto Kusano, Eiji Tanaka, Tatsuya Kinbara, Akira Nanto, Hidehito |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 149 (2002) nr. 1 pages 6 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 13 found articles
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