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                                       Details for article 4 of 19 found articles
 
 
  Deposition of TiN thin films on Si(100) by HCD ion plating
 
 
Title: Deposition of TiN thin films on Si(100) by HCD ion plating
Author: Chou, Wen-Jun
Yu, Ge-Ping
Huang, Jia-Hong
Appeared in: Surface & coatings technology
Paging: Volume 140 (2001) nr. 3 pages 9 p.
Year: 2001
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4 of 19 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands