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                                       Details for article 14 of 19 found articles
 
 
  Square-wave low-frequency modulation of the discharge current for high rate deposition of stoichiometric ceramic films
 
 
Title: Square-wave low-frequency modulation of the discharge current for high rate deposition of stoichiometric ceramic films
Author: Billard, A
Mercs, D
Perry, F
Frantz, C
Appeared in: Surface & coatings technology
Paging: Volume 140 (2001) nr. 3 pages 6 p.
Year: 2001
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 14 of 19 found articles
 
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