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  Shunting arc as a pulsed ion source for solid-state materials for plasma-based ion implantation
 
 
Title: Shunting arc as a pulsed ion source for solid-state materials for plasma-based ion implantation
Author: Yukimura, K
Yoshioka, K
Tani, Y
Masamune, S
Appeared in: Surface & coatings technology
Paging: Volume 136 (2001) nr. 1-3 pages 5 p.
Year: 2001
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 50 of 63 found articles
 
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