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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 81 of 111 found articles
| Title: |
Review of heating mechanism in inductively coupled plasma |
| Author: |
Seo, Sang-Hun Chung, ChinWook Chang, Hong-Young |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 131 (2000) nr. 1-3 pages 11 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 81 of 111 found articles
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