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                                       Details for article 12 of 25 found articles
 
 
  Effect of deposition conditions on internal stresses and microstructure of reactively sputtered tungsten nitride films
 
 
Title: Effect of deposition conditions on internal stresses and microstructure of reactively sputtered tungsten nitride films
Author: Shen, Y.G
Mai, Y.W
Appeared in: Surface & coatings technology
Paging: Volume 127 (2000) nr. 2-3 pages 8 p.
Year: 2000
Contents:
Publisher: Elsevier Science S.A.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 12 of 25 found articles
 
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